JPH0171498U - - Google Patents
Info
- Publication number
- JPH0171498U JPH0171498U JP1987167540U JP16754087U JPH0171498U JP H0171498 U JPH0171498 U JP H0171498U JP 1987167540 U JP1987167540 U JP 1987167540U JP 16754087 U JP16754087 U JP 16754087U JP H0171498 U JPH0171498 U JP H0171498U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- sensor
- conveyance path
- determining
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 239000003550 marker Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167540U JPH0171498U (en]) | 1987-10-31 | 1987-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167540U JPH0171498U (en]) | 1987-10-31 | 1987-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171498U true JPH0171498U (en]) | 1989-05-12 |
Family
ID=31455927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987167540U Pending JPH0171498U (en]) | 1987-10-31 | 1987-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171498U (en]) |
-
1987
- 1987-10-31 JP JP1987167540U patent/JPH0171498U/ja active Pending
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